Into | Impahla Yobuchwepheshe | |
I-Argon (Ar) ubumsulwa (ingxenye yevolumu)/10-2≥ | 99.9999 | 99.9992 |
IHydrojeni (H2) okuqukethwe (ingxenyana yevolumu)/10-6≤ | 0.1 | 1 |
I-nitrogen (N2) okuqukethwe (ingxenyana yevolumu)/10-6≤ | 0.5 | 5 |
I-Oxygen (O2) okuqukethwe (ingxenyana yevolumu)/10-6≤ | 0.2 | 0.5 |
Ingqikithi yokuqukethwe kwe-carbon monoxide (CO) ne-carbon dioxide (CO2), (ingxenye yevolumu)/10-6≤ | I-Carbon monoxide: 0.1 I-Carbon dioxide: 0.1 | 0.5 |
Ingqikithi ye-hydrocarbon (ebalwa nge-methane) (ingxenye yevolumu)/10-6≤ | 0.1 | 0.5 |
Amanzi (H2O) okuqukethwe (ingxenyana yevolumu)/10-6≤ | 0.2 | 0.5 |
Ingqikithi yokungcola (ingxenye yevolumu)/10-6≤ | 1 | 8 |
Okusanhlamvu | Kuvunywe Umphakeli kanye Nomfunayo | Kuvunywe Umphakeli kanye Nomfunayo |
Qaphela: Okuqukethwe kwamanzi kwe-argon ye-liquid kuzolinganiswa ngemva kokufakwa kwe-gasification |
Inkambu yesicelo: ikakhulukazi esetshenziselwa ukuhlanza, ukuvikela kanye nokucindezela uhlelo. Ingasetshenziswa futhi ekubekeni umhwamuko wamakhemikhali, ukuphalaza, iplasma kanye ne-ion etchant esebenzayo, i-annealing nezinye izinqubo ezihlukene, kanye nakwigesi exubene ye-elekthronikhi ekhethekile.