Element | Texnik mulk |
Yuqori toza neon | |
Neon (Ne) tozaligi (hajm ulushi)/10-2≥ | 99.999 |
Geliy (He) tarkibi (hajm ulushi)/10-6≤ | 6 |
Vodorod (H2) mazmuni (hajm ulushi)/10-6≤ | 1 |
Kislorod+argon (kislorod bilan hisoblangan) (O2+Ar) tarkibi (hajm ulushi)/10-6≤ | 1 |
Azot (N2) mazmuni (hajm ulushi) zz/10-6≤ | 2 |
Uglerod oksidi (CO) tarkibi (hajm ulushi)/10-6≤ | 0.2 |
Karbonat angidrid (CO2) mazmuni (hajm ulushi)/10-6≤ | 0.2 |
Metan (CH4) mazmuni (hajm ulushi)/10-6≤ | 0.1 |
Suv (H2O) mazmuni (hajm ulushi)/10-6≤ | 2 |
Nopoklikning umumiy miqdori (hajm ulushi) / 10-6≤ | 10 |