item | Teknikal na Ari-arian | ||
Purong nitrogen | Mataas na kadalisayan ng nitrogen | Ultrapure nitrogen | |
Nitrogen (N2) kadalisayan (volume fraction)/10-2≥ | 99.99 | 99.999 | 99.9999 |
Oxygen (O2) nilalaman (volume fraction)/10-6≤ | 50 | 3 | 0.1 |
Nilalaman ng Argon (Ar) (volume fraction)/10-6≤ | - | - | 2 |
Hydrogen (H2) nilalaman (volume fraction)/10-6≤ | 15 | 1 | 0.1 |
Nilalaman ng carbon monoxide (CO) (volume fraction)/10-6≤ | 5 | 1 | 0.1 |
Carbon dioxide (CO2) nilalaman (volume fraction)/10-6≤ | 10 | 1 | 0.1 |
Methane (CH4) nilalaman (volume fraction)/10-6≤ | 5 | 1 | 0.1 |
Tubig (H2O) nilalaman (volume fraction)/10-6≤ | 15 | 3 | 0.5 |