Lihlahisoa
Tetrafluoride ea carbon
Tetrafluoromethane, eo hape e tsejoang e le carbon tetrafluoride, ke fluorocarbon e bonolo ka ho fetisisa (CF4).E na le matla a holimo haholo a tlamahano ka lebaka la mofuta oa bond ea carbon-fluorine.E ka boela ea hlalosoa e le haloalkane kapa halomethane.Ka lebaka la li-bond tse ngata tsa carbon-fluorine, le electronegativity e phahameng ka ho fetisisa ea fluorine, carbon e tetrafluoromethane e na le tefiso e ntle e ntle e matlafatsang le ho khutsufatsa li-bond tse 'nè tsa carbon-fluorine ka ho fana ka sebopeho se eketsehileng sa ionic.Tetrafluoromethane ke khase e futhumatsang lefatše e matla.
Ka linako tse ling Tetrafluoromethane e sebelisoa e le sehatsetsi se tlase sa mocheso.E sebelisoa ho microfabrication ea elektronike feela kapa hammoho le oksijene e le plasma etchant bakeng sa silicon, silicon dioxide, le silicon nitride.
| Foromo ea lik'hemik'hale | CF4 | Boima ba molek'hule | 88 |
| Nomoro ea CAS. | 75-73-0 | EINECS No. | 200-896-5 |
| Sebaka se qhibilihang | -184 ℃ | Boling point | -128.1 ℃ |
| ho qhibiliha | Ha e kenelle ka metsing | Botenya | 1.96g/cm³ (-184℃) |
| Ponahalo | Khase e se nang 'mala, e sa nkheng, e sa cheng, e hatellehang | Kopo | e sebelisoa ts'ebetsong ea plasma etching bakeng sa lipotoloho tse fapaneng tse kopaneng, hape e sebelisoa joalo ka khase ea laser, sehatsetsi joalo-joalo. |
| Nomoro ea ID ea DOT | UN1982 | DOT/IMO SHIPPING NAME: | Tetrafluoromethane, Khase e Hatelitsoeng kapa e Refrigerant R14 |
| Sehlopha sa kotsi sa DOT | Sehlopha sa 2.2 |
| Ntho | Boleng, sehlopha sa I | Boleng, sehlopha sa II | Yuniti |
| Bohloeki | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv |
| N2 | ≤4.0 | ≤1.0 | ppmv |
| CO | ≤0.1 | ≤0.1 | ppmv |
| CO2 | ≤1.0 | ≤0.5 | ppmv |
| SF6 | ≤0.8 | ≤0.2 | ppmv |
| Li-fluorocarbons tse ling | ≤1.0 | ≤0.5 | ppmv |
| H2O | ≤1.0 | ≤0.5 | ppmv |
| H2 | ≤1.0 | —- | ppmv |
| Asiti | ≤0.1 | ≤0.1 | ppmv |
| *Li-fluorocarbon tse ling li bua ka C2F6, C3F8 | |||
Lintlha
1) lintlha tsohle tsa tekheniki tse bontšitsoeng ka holimo ke tsa referense ea hau.
2) litlhaloso tse ling li amohelehile bakeng sa lipuisano tse ling.
