Tetrafluoromethane, inozivikanwawo secarbon tetrafluoride, ndiyo yakapfava fluorocarbon (CF4).Iine simba rakanyanya rekubatanidza nekuda kwechimiro checarbon-fluorine bond.Inogonawo kuiswa sehaloalkane kana halomethane.Nekuda kweakawanda kabhoni-fluorine bond, uye yakanyanya electronegativity yefluorine, iyo kabhoni iri mutetrafluoromethane ine yakakosha chikamu chechaji inosimbisa nekupfupisa mana kabhoni-fluorine zvisungo nekupa humwe humiro hweionic.Tetrafluoromethane igasi rine simba regreenhouse.
Tetrafluoromethane dzimwe nguva inoshandiswa seyakadzika tembiricha refrigerant.Inoshandiswa mumagetsi microfabrication chete kana musanganiswa neokisijeni seplasma etchant yesilicon, silicon dioxide, uye silicon nitride.
Chemical formula | CF4 | Molecular uremu | 88 |
CAS Nha. | 75-73-0 | EINECS Nha. | 200-896-5 |
Melting point | -184 ℃ | Boling point | -128.1 ℃ |
solubility | Insoluble mumvura | Density | 1.96g/cm³ (-184℃) |
Chitarisiko | Gasi risina ruvara, risinganhuhwi, risingabatike, rinogadzikika | Application | inoshandiswa muplasma etching process yeakasiyana akasanganiswa maseketi, uye inoshandiswawo selaser gasi, refrigerant etc. |
DOT ID nhamba | UN1982 | DOT/IMO SHIPPING NAME: | Tetrafluoromethane, Yakadzvanywa kana Refrigerant Gasi R14 |
DOT Hazard Kirasi | Kirasi 2.2 |
Item | Value, giredhi I | Kukosha, giredhi II | Unit |
Kuchena | ≥99.999 | ≥99.9997 | % |
O2 | ≤1.0 | ≤0.5 | ppm |
N2 | ≤4.0 | ≤1.0 | ppm |
CO | ≤0.1 | ≤0.1 | ppm |
CO2 | ≤1.0 | ≤0.5 | ppm |
SF6 | ≤0.8 | ≤0.2 | ppm |
Mamwe mafluorocarbons | ≤1.0 | ≤0.5 | ppm |
H2O | ≤1.0 | ≤0.5 | ppm |
H2 | ≤1.0 | —— | ppm |
Acidity | ≤0.1 | ≤0.1 | ppm |
*mamwe mafluorocarbons anoreva C2F6, C3F8 |
Notes
1) data yese yehunyanzvi inoratidzwa pamusoro ndeye yako referensi.
2) kumwe kutsanangurwa kunogamuchirwa kune imwe hurukuro.