Oloa
Carbon Tetrafluoride
Tetrafluoromethane, e lauiloa foi o le carbon tetrafluoride, o le fluorocarbon sili ona faigofie (CF4).E maualuga tele le malosi fa'apipi'i ona o le natura o le fa'apalapala carbon-fluorine.E mafai foi ona fa'avasegaina o se haloalkane po'o le halomethane.Ona o le tele o fusi carbon-fluorine, ma le maualuga o le electronegativity o le fluorine, o le kaponi i le tetrafluoromethane ei ai se vaega taua tele totogi e faʻamalosia ma faʻapuupuu le fa carbon-fluorine fusi e ala i le tuʻuina atu o uiga ionic faaopoopo.Tetrafluoromethane ose kasa vevela malosi.
O le Tetrafluoromethane e fa'aaogaina i nisi taimi e fai ma fa'aaisa maualalo le vevela.E fa'aaogaina i mea fa'akomepiuta microfabrication na'o ia pe fa'atasi ma le okesene e avea o se plasma etchant mo silicon, silicon dioxide, ma silicon nitride.
| Fua fa'ameamea | CF4 | mamafa mole | 88 |
| CAS Nu. | 75-73-0 | EINECS Nu. | 200-896-5 |
| Liu liusuavai | -184℃ | Manu'a | -128.1 ℃ |
| solubility | E le mafai ona solu ile vai | Malosi | 1.96g/cm³（-184℃） |
| Fa'aaliga | O se kasa e leai se lanu, e leai se manogi, e le mu, e fa'apipi'i | Fa'atatauga | faʻaaogaina i le faʻaogaina o le plasma mo le tele o fesoʻotaʻiga tuʻufaʻatasia, ma faʻaaogaina foi e pei o le laser gas, refrigerant ma isi. |
| DOT ID Numera | UN1982 | DOT/IMO IGOA VAA: | Tetrafluoromethane, Kasa Compressed po'o le Puaisa R14 |
| DOT Vasega Mata'utia | Vasega 2.2 |
| Aitema | Taua, vasega I | Taua, vasega II | Vaega |
| mama | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv |
| N2 | ≤4.0 | ≤1.0 | ppmv |
| CO | ≤0.1 | ≤0.1 | ppmv |
| CO2 | ≤1.0 | ≤0.5 | ppmv |
| SF6 | ≤0.8 | ≤0.2 | ppmv |
| Isi fluorocarbons | ≤1.0 | ≤0.5 | ppmv |
| H2O | ≤1.0 | ≤0.5 | ppmv |
| H2 | ≤1.0 | —— | ppmv |
| Acidity | ≤0.1 | ≤0.1 | ppmv |
| *isi fluorocarbons e faasino ile C2F6、C3F8 | |||
Fa'amatalaga
1) o faʻamatalaga faʻapitoa uma o loʻo faʻaalia i luga e mo lau faʻamatalaga.
2) e talia nisi fa'amatalaga mo nisi talanoaga.
