Item |
Technical Property |
||
Pure nitrogen |
High purity nitrogen |
Ultrapure nitrogen |
|
Nitrogen (N2) purity (volume fraction)/10-2≥ |
99.99 |
99.999 |
99.9999 |
Oxygen (O2) content (volume fraction)/10-6≤ |
50 |
3 |
0.1 |
Argon (Ar) content (volume fraction)/10-6≤ |
- |
- |
2 |
Hydrogen (H2) content (volume fraction)/10-6≤ |
15 |
1 |
0.1 |
Carbon monoxide (CO) content (volume fraction)/10-6≤ |
5 |
1 |
0.1 |
Carbon dioxide (CO2) content (volume fraction)/10-6≤ |
10 |
1 |
0.1 |
Methane (CH4) content (volume fraction)/10-6≤ |
5 |
1 |
0.1 |
Water (H2O) content (volume fraction)/10-6≤ |
15 |
3 |
0.5 |