Zogulitsa
Mpweya wa Tetrafluoride
Tetrafluoromethane, yomwe imadziwikanso kuti carbon tetrafluoride, ndi fluorocarbon yosavuta kwambiri (CF4).Ili ndi mphamvu yolumikizana kwambiri chifukwa cha chikhalidwe cha carbon-fluorine chomangira.Itha kugawidwanso ngati haloalkane kapena halomethane.Chifukwa cha ma bond angapo a carbon-fluorine, komanso mphamvu yayikulu kwambiri yamagetsi ya fluorine, mpweya wa tetrafluoromethane uli ndi gawo lofunikira lomwe limalimbitsa ndikufupikitsa zomangira zinayi za kaboni-fluorine popereka mawonekedwe owonjezera a ayoni.Tetrafluoromethane ndi mpweya wowonjezera kutentha.
Tetrafluoromethane nthawi zina amagwiritsidwa ntchito ngati firiji yotsika kutentha.Amagwiritsidwa ntchito pamagetsi a microfabrication okha kapena kuphatikiza ndi okosijeni ngati plasma etchant ya silicon, silicon dioxide, ndi silicon nitride.
| Chemical formula | CF4 | Kulemera kwa maselo | 88 |
| CAS No. | 75-73-0 | EINECS No. | 200-896-5 |
| Malo osungunuka | -184 ℃ | Boling point | -128.1 ℃ |
| kusungunuka | Zosasungunuka m'madzi | Kuchulukana | 1.96g/cm³ (-184 ℃) |
| Maonekedwe | Gasi wopanda mtundu, wosanunkhiza, wosayaka, wokhazikika | Kugwiritsa ntchito | amagwiritsidwa ntchito mu plasma etching process pamabwalo osiyanasiyana ophatikizika, komanso amagwiritsidwa ntchito ngati mpweya wa laser, refrigerant etc. |
| Nambala ya ID ya DOT | UN 1982 | DOT/IMO SHIPPING NAME: | Tetrafluoromethane, Woponderezedwa kapena Refrigerant Gasi R14 |
| Kalasi Yowopsa ya DOT | Kalasi 2.2 |
| Kanthu | Mtengo, kalasi I | Mtengo, kalasi II | Chigawo |
| Chiyero | ≥99.999 | ≥99.9997 | % |
| O2 | ≤1.0 | ≤0.5 | ppmv |
| N2 | ≤4.0 | ≤1.0 | ppmv |
| CO | ≤0.1 | ≤0.1 | ppmv |
| CO2 | ≤1.0 | ≤0.5 | ppmv |
| SF6 | ≤0.8 | ≤0.2 | ppmv |
| Ma fluorocarbons ena | ≤1.0 | ≤0.5 | ppmv |
| H2O | ≤1.0 | ≤0.5 | ppmv |
| H2 | ≤1.0 | —- | ppmv |
| Acidity | ≤0.1 | ≤0.1 | ppmv |
| *Fluorocarbons ena amatchula C2F6, C3F8 | |||
Zolemba
1) deta yonse yaukadaulo yomwe yawonetsedwa pamwambapa ndi yanu.
2) Mafotokozedwe ena ndi olandiridwa kuti mupitirize kukambirana.
