Item |
Technical Property |
Argon (Ar) purity (volume fraction)/10-2≥ |
99.999 |
Hydrogen (H2) content (volume fraction)/10-6≤ |
0.5 |
Oxygen (O2) content (volume fraction)/10-6≤ |
1.5 |
Nitrogen (N2) content (volume fraction)/10-6≤ |
4 |
Methane (CH4) content (volume fraction)/10-6≤ |
0.4 |
Carbon monoxide (CO) content (volume fraction)/10-6≤ |
0.3 |
Carbon dioxide (CO2) content (volume fraction)/10-6≤ |
0.3 |
Water (H2O) content (volume fraction)/10-6≤ |
3 |
Note: Liquid argon does not detect moisture content |