'ikamu | Waiwai ʻenehana | ||
Xenon maʻemaʻe kiʻekiʻe GB/T5828-2006 | Xenon maʻemaʻe | ||
Xenon (Xe) maʻemaʻe (haʻina leo)/10-2≥ | 99.999 | 99.9995 | 99.9999 |
Nitrogen (N2) maʻiʻo (haʻina leo)/10-6≤ | 2.5 | 1.5 | 0.2 |
Oxygen (O2) maʻiʻo (haʻina leo)/10-6≤ | 1.5(ʻO2+Ar) | 0.5(ʻO2+Ar) | 0.1 |
ʻO Argon (Ar) maʻiʻo (ʻāpana leo)/10-6≤ | 0.05 | ||
H2) maʻiʻo (haʻina leo)/10-6≤ | 0.5 | 0.5 | 0.05 |
ʻO ka maʻiʻo kalapona monoxide (CO) (kahi hapa nui)/10-6≤ | 0.2 | 0.1 | 0.05(CO+CO2) |
ʻO ka maʻiʻo kalapona (CO2) (haʻina leo)/10-6≤ | 0.3 | 0.1 | |
Metana (CH4) maʻiʻo (haʻina leo)/10-6≤ | 0.3 | 0.1 | 0.05 |
Wai (H2O) maʻiʻo (haʻina leo)/10-6≤ | 2 | 1 | 0.1 |
Krypton (Kr) maʻiʻo (ʻāpana leo)/10-6≤ | 2 | 1 | 0.1 |
Nitrous oxide (N2O) maʻiʻo (haʻina leo)/10-6≤ | 0.2 | 0.1 | 0.05 |
Fluoride (C2F6) maʻiʻo (haʻina leo)/10-6≤ | 0.5 | 0.1 | 0.05 |
Fluoride (SF6) maʻiʻo (haʻina leo)/10-6≤ | N/A | N/A | 0.05 |
Nā kahua noi: hoʻohana nui ʻia i ka ʻoihana semiconductor, aerospace, ʻoihana kumu kukui uila, lapaʻau lapaʻau, ʻenekini uila, noiʻi ʻeleʻele, laser a me nā ʻano ʻē aʻe.