Item |
Technical Property |
High purity helium |
|
Helium He purity (volume fraction)/10-2 ≥ |
99.999 |
Neon (Ne) content (volume fraction)/10-6 ≤ |
4 |
Hydrogen (H2) content (volume fraction)/10-6 ≤ |
1 |
Oxygen (O2) content (volume fraction)/10-6 ≤ |
1 |
Argon (Ar) content (volume fraction)/10-6 ≤ | |
Nitrogen (N2) content (volume fraction)/10-6 ≤ |
2 |
Carbon monoxide (CO) content (volume fraction)/10-6≤ |
0.5 |
Carbon dioxide (CO2) content (volume fraction)/10-6≤ |
0.5 |
Methane (CH4) content (volume fraction)/10-6≤ |
0.5 |
Water H2O content (volume fraction)/10-6≤ |
3 |
Total magazine content/10-6≤ |
10 |